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Title: Gas-phase reactions in plasmas of SF6 with O2: Reactions of F with SOF2 and SO2 and reactions of O with SOF2
Journal: Plasma Chem. Plasma Process.
Volume: 9
Page(s): 409 - 420
Year: 1989
Reference type: Journal article
Squib: 1989PLU/RYA409-420
Reaction:
SOF2 + O· → SO2F2
Reaction order:
2
Temperature:
295
K
Pressure: 2.67E-3 bar
Rate expression:
1.0x10-14 [cm3/molecule s]
Rate constant is an upper limit.
Bath gas:
He
Category: Experiment
Data type:
Absolute value measured directly
Excitation technique:
Electron beam
Analytical technique:
Mass spectrometry
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