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Home ©NIST, 2013 Accessibility information |
Title: Kinetic correlations for H2 addition and elimination reaction mechanisms during silicon hydride pyrolysis
Journal: Phys. Chem. Chem. Phys.
Volume: 12
Page(s): 12676 - 12696
Year: 2010
Reference type: Journal article
Squib: 2010ADA/REY12676-12696
Reaction:
SiH3SiH2SiH: + H2 → Si3H8
Reaction order:
2
Temperature:
800 - 1200
K
Rate expression:
1.0x10-11 [cm3/molecule s] e-8786 [J/mole]/RT
Category: Theory
Data type:
Transition state theory
Pressure dependence:
Rate constant is high pressure limit
Comments:
Reaction potential energy surface was studied using quantum chemistry and rate constants were calculated using transition state theory.
View full bibliographic record.
Rate constant values calculated from the Arrhenius expression:
| T (K) | k(T) [cm3/molecule s] |
|---|---|
| 800 | 2.67E-12 |
| 825 | 2.78E-12 |
| 850 | 2.88E-12 |
| 875 | 2.99E-12 |
| 900 | 3.09E-12 |
| 925 | 3.19E-12 |
| 950 | 3.29E-12 |
| 975 | 3.38E-12 |
| 1000 | 3.48E-12 |
| 1025 | 3.57E-12 |
| 1050 | 3.66E-12 |
| 1075 | 3.74E-12 |
| 1100 | 3.83E-12 |
| 1125 | 3.91E-12 |
| 1150 | 3.99E-12 |
| 1175 | 4.07E-12 |
| 1200 | 4.15E-12 |