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Title: Gas-phase combination reactions of SF4 and SF5 with F in plasmas of SF6
Journal: Plasma Chem. Plasma Process.
Volume: 8
Page(s):
Year: 1988
Reference type: Journal article
Squib: 1988RYA/PLU281
Reaction:
SF4 + ·F → SF5
Reaction order:
2
Temperature:
295
K
Pressure: 8.00E-4 - 1.07E-2 bar
Rate expression:
5.0x10-12 [cm3/molecule s]
Bath gas:
He
Category: Experiment
Data type:
High or low pressure extrapolation
Excitation technique:
Electron beam
Analytical technique:
Mass spectrometry
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