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Author(s):   Ryan, K.R.; Plumb, I.C.
Title:   Gas-phase combination reactions of SF4 and SF5 with F in plasmas of SF6
Journal:   Plasma Chem. Plasma Process.
Volume:   8
Year:   1988
Reference type:   Journal article
Squib:   1988RYA/PLU281

Reaction:   SF5 + ·FSF6
Reaction order:   2
Temperature:   295 K
Pressure:  4.27E-3 bar
Rate expression:   9.0x10-12 [cm3/molecule s]
Uncertainty:   2.0
Bath gas:   He
Category:  Experiment
Data type:   Absolute value measured directly
Excitation technique:   Electron beam
Analytical technique:   Mass spectrometry

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