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Author(s):   Plumb, I.C.; Ryan, K.R.
Title:   Gas-phase reactions of SF5, SF2, and SOF with O(3P): Their significance in plasma processing
Journal:   Plasma Chem. Plasma Process.
Volume:   6
Year:   1986
Reference type:   Journal article
Squib:   1986PLU/RYA247

Reaction:   ·CF3 + O2CF3O2
Reaction order:   3
Temperature:   295 K
Rate expression:   3.5x10-29 [cm6/molecule2 s]
Bath gas:   Products
Category:  Theory
Data type:   Other theoretical

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