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Ryan, K.R.; Plumb, I.C.
Title: Gas-phase combination reactions of SF4 and SF5 with F in plasmas of SF6
Journal: Plasma Chem. Plasma Process.
Reference type: Journal article
Rate expression: k(T) = A (T/298 K)n e-Ea/RT
Rate expression units:
First order: s-1
Second order: cm3/molecule s
Third order: cm6/molecule2 s
R = 8.314472 J / mole K
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