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Accessibility information
Author(s):   Plumb, I.C.; Ryan, K.R.
Title:   Gas-phase reactions of SF5, SF2, and SOF with O(3P): Their significance in plasma processing
Journal:   Plasma Chem. Plasma Process.
Volume:   6
Year:   1986
Reference type:   Journal article
Squib:   1986PLU/RYA247

Associated entries:

Search Results

Rate expression:  k(T) = A (T/298 K)n e-Ea/RT
Rate expression units:
First order:  s-1
Second order:  cm3/molecule s
Third order:  cm6/molecule2 s
R = 8.314472 J / mole K
Energy Units J   Molecular Units Molecule
Pressure Units bar   Temperature Units K
Base Volume Unit cm   Reference Temperature 298.0
Evaluation Temperature 298.0

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| |
Plot   Squib   Reaction   Temp [K]   A   n   Ea [J/mole]   k(298.00 K)   Order
  1986PLU/RYA247   ·CF3 + O2CF3O2  295   3.50E-29              3
  1986PLU/RYA247   O2 + SF5 → Products  295   <5.00E-16              2
  1986PLU/RYA247   O2 + SF2 → Products  295   <5.00E-16              2
  1986PLU/RYA247   SF5 + SOF4 + ·F  295   2.01E-11              2
  1986PLU/RYA247   SF2 + ·F + SOF  295   1.08E-10              2
  1986PLU/RYA247   + SOF → Products  295   7.89E-11              2

Search returned 6 records.