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Author(s):   Plumb, I.C.; Ryan, K.R.
Title:   Gas-phase reactions of SF5, SF2, and SOF with O(3P): Their significance in plasma processing
Journal:   Plasma Chem. Plasma Process.
Volume:   6
Year:   1986
Reference type:   Journal article
Squib:   1986PLU/RYA247

Reaction:   SF5 + SOF4 + ·F
Reaction order:   2
Temperature:   295 K
Pressure:  2.67E-3 bar
Rate expression:   2.01x10-11 [±4.98x10-12 cm3/molecule s]
Bath gas:   He
Category:  Experiment
Data type:   Absolute value measured directly
Excitation technique:   Electron beam
Analytical technique:   Mass spectrometry

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