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Title: Gas-phase reactions of SF5, SF2, and SOF with O(3P): Their significance in plasma processing
Journal: Plasma Chem. Plasma Process.
Volume: 6
Page(s):
Year: 1986
Reference type: Journal article
Squib: 1986PLU/RYA247
Reaction:
SF5 + O· → SOF4 + ·F
Reaction order:
2
Temperature:
295
K
Pressure: 2.67E-3 bar
Rate expression:
2.01x10-11 [±4.98x10-12 cm3/molecule s]
Bath gas:
He
Category: Experiment
Data type:
Absolute value measured directly
Excitation technique:
Electron beam
Analytical technique:
Mass spectrometry
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