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Chemical Sciences Division
Applied Chemicals and Materials Division
Noda, K.; Kunioshi, N.; Fuwa, A.
Pressure Dependence of Rate Coefficients for Formation and Dissociation of Pentachlorodisilane and Related Chemical Activation Reactions
Int. J. Chem. Kinet.
584 - 595
SiCl4 + SiHCl → SiHCl3 + SiCl2
873 - 1373
Pressure: 1.01 bar
3.65x10-11 [cm3/molecule s] e-83262 [J/mole]/RT
Transition state theory
Rate constant is pressure dependent
Reaction potential energy surface was studied using quantum chemistry and rate constants were calculated for wide ranges of temperatures and pressures (0.1 - 100 atm) using transition state theory, RRKM, and master equation. Rate constants for individual chemically activated channels are presented as a table of Chebyshev polynomial coefficients. An Arrhenius equation (quoted here) is given only for one of the channels for the pressure of 1 atm.
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Rate constant values calculated from the Arrhenius expression:
|T (K)||k(T) [cm3/molecule s]|