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Author(s):   Kambanis, K.G.; Lazarou, Y.G.; Papagiannakopoulos, P.
Title:   Kinetic studies of the reaction of Cl atoms with SiH4
Journal:   J. Chem. Soc. Faraday Trans.
Volume:   92
Page(s):   3299 - 3303
Year:   1996
Reference type:   Journal article
Squib:   1996KAM/LAZ3299-3303

Reaction:   SiH4 + ·ClHCl + SiH3
Reaction order:   2
Temperature:   273 - 363 K
Rate expression:   3.25x10-10 [±3.99x10-11 cm3/molecule s]
Bath gas:   He
Category:  Experiment
Data type:   Absolute value measured directly
Excitation technique:   Thermal
Analytical technique:   Mass spectrometry

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