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Author(s):   Buchta, C.; Stucken, D.-V.; Vollmer, J.-T.; Wagner, H.Gg.
Title:   Kinetic investigations of the reactions of monosilane, monochlorosilane, dichlorosilane, trichlorosilane and tetrachlorosilane with atomic oxygen in the electronic ground state (O(3P))
Journal:   Z. Phys. Chem. (Munich)
Volume:   185
Page(s):   153 - 163
Year:   1994
Reference type:   Journal article
Squib:   1994BUC/STU153-163

Reaction:   SiCl4 + → Products
Reaction order:   2
Temperature:   298 - 773 K
Rate expression:   1.66x10-16 [cm3/molecule s]
Rate constant is an upper limit.
Bath gas:   He
Category:  Experiment
Data type:   Absolute value measured directly
Excitation technique:   Electron beam
Analytical technique:   Mass spectrometry

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