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Author(s):   Ring, M.A.; O'Neal, H.E.; Walker, K.L.
Title:   Kinetics of dichlorosilylene trapping by methane and mechanism and kinetics of the methyldichlorosilane decomposition
Journal:   Int. J. Chem. Kinet.
Volume:   30
Page(s):   89 - 97
Year:   1998
Reference type:   Journal article
Squib:   1998RIN/ONE89-97

Reaction:   CH4 + SiCl2CH3SiHCl2
Reaction order:   2
Temperature:   921 K
Pressure:  1.13E-2 - 0.13 bar
Rate expression:   2.23x10-20 [±4.15x10-21 cm3/molecule s]
Bath gas:   Ar
Category:  Experiment
Data type:   Absolute value measured directly
Excitation technique:   Thermal
Time resolution:   In real time
Analytical technique:   Mass spectrometry

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