Kinetics Database Logo

Kinetics Database Resources

Simple Reaction Search

Search Reaction Database

Search Bibliographic Database

Set Unit Preferences

Feedback

Rate Our Products and Services

Help


Other Databases

NIST Standard Reference Data Program

NIST Chemistry Web Book

NDRL-NIST Solution Kinetics Database

NIST Computational Chemistry Comparison and Benchmark Database

The NIST Reference on Constants, Units, and Uncertainty

More...


Administrative Links

NIST home page

MML home page

Chemical and Biochemical Reference Data Division

MML home page

Chemical and Biochemical Reference Data Division

  NIST Logo Home
©NIST, 2013
Accessibility information
Author(s):   Creighton, J.R.; Wang, G.T.;
Title:   Kinetics of metal organic-ammonia adduct decomposition: implications for Group-III Nitride MOCVD
Journal:   J. Phys. Chem. A
Volume:   109
Page(s):   10554 - 10562
Year:   2005
Reference type:   Journal article
Squib:   2005CRE/WAN10554-10562

Reaction:   GaMe3:NH3 → GaMe2NH2 + CH4
Reaction order:   1
Temperature:   298 - 573 K
Pressure:  6.67E-2 - 0.27 bar
Rate expression:   1.0x1012 [s-1] e-129704 [J/mole]/RT
Category:  Experiment
Data type:   Derived from fitting to a complex mechanism
Pressure dependence:   None reported
Experimental procedure:   Static or low flow - Data taken vs time
Excitation technique:   Thermal
Time resolution:   By end product analysis
Analytical technique:   Fourier transform (FTIR)
Comments:   FTIR spectroscopic study of reations involving adducts of Trimethylaluminum and Trimethylgallium with ammonia (NH3). Temperature range 298-573K, 50-200 torr H2 bath gas. Detected CH4 and -NH2 group in product stream. Measured conversion as a function of residence time to get rate expressions.

Directly measured decomposition of AlMe3:NH3 adduct to AlMe2NH2 + CH4. Indirectly measured decomposition of GaMe3:NH3 to GaMe2NH2 + CH4 assuming a preexponential and some complex chemistry. Also studied the association reactions AlMe3 + NH3 -> AlMe3:NH2 and AlMe2NH2 + AlMe2NH2 -> [AlMe2NH2]2, but no rate expressions were determined.

View full bibliographic record.


Rate constant values calculated from the Arrhenius expression:

T (K)k(T) [s-1]
298 1.84E-11
300 2.61E-11
325 1.43E-9
350 4.40E-8
375 8.58E-7
400 1.16E-5
425 1.15E-4
450 8.80E-4
475 5.46E-3
500 2.82E-2
525 1.25E-1
550 4.81E-1
573 1.50E0